JPS629263U - - Google Patents
Info
- Publication number
- JPS629263U JPS629263U JP9986085U JP9986085U JPS629263U JP S629263 U JPS629263 U JP S629263U JP 9986085 U JP9986085 U JP 9986085U JP 9986085 U JP9986085 U JP 9986085U JP S629263 U JPS629263 U JP S629263U
- Authority
- JP
- Japan
- Prior art keywords
- scale
- halftone gradation
- film
- pattern
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000206 photolithography Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9986085U JPS629263U (en]) | 1985-06-29 | 1985-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9986085U JPS629263U (en]) | 1985-06-29 | 1985-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS629263U true JPS629263U (en]) | 1987-01-20 |
Family
ID=30969130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9986085U Pending JPS629263U (en]) | 1985-06-29 | 1985-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS629263U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4882904A (en]) * | 1972-02-04 | 1973-11-06 | ||
| JPS6030442B2 (ja) * | 1977-09-02 | 1985-07-16 | 日本電気株式会社 | マイクロ波トランジスタの整合回路 |
-
1985
- 1985-06-29 JP JP9986085U patent/JPS629263U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4882904A (en]) * | 1972-02-04 | 1973-11-06 | ||
| JPS6030442B2 (ja) * | 1977-09-02 | 1985-07-16 | 日本電気株式会社 | マイクロ波トランジスタの整合回路 |